Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy

Process and system for detection of contamination in an imaging system, including providing an imaging system having one or more element having a surface for reflecting or refracting first incident radiation; mounting with respect to at least one of the one or more element one or more detector capab...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LALOVIC IVAN, LAFONTAINE BRUNO M
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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