Structure for attenuation or cancellation of quadrature error

A movable microstructure includes a first finger set comprising two or more first fingers affixed to a substrate and extending substantially parallel to a defined displacement axis towards a proof-mass. The movable microstructure further includes a second finger set comprising at least one second fi...

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Bibliographische Detailangaben
Hauptverfasser: JUNEAU THOR N, CLARK WILLIAM A, LEMKIN MARK A, ROESSIG ALLEN W
Format: Patent
Sprache:eng
Schlagworte:
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