Darkfield inspection system having a programmable light selection array

Darkfield inspection system having a programmable light selection array

An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light...

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Hauptverfasser: SULLIVAN PAUL J, KREN GEORGE J, BEVIS CHRISTOPHER F, SHORTT DAVID W
Format: Patent
Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator SULLIVAN PAUL J
KREN GEORGE J
BEVIS CHRISTOPHER F
SHORTT DAVID W
description An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light selection array that receives light scattered from the workpiece and selectively directs the light scattered from defects onto a photosensor which detects the defect signal. Processing circuitry receives the defect signal and conducts surface analysis of the workpiece that can include the characterizing of defects of the workpiece. The programmable light selection arrays can include, but are not limited to, reflector arrays and filter arrays. The invention also includes associated surface inspection methods.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US7002677B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US7002677B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US7002677B23</originalsourceid><addsrcrecordid>eNqNyjsOwjAMANAsDAi4gy-AVBWJ7Px3YK5McVML5yM7QurtWXoApre8pbueUD8Dk7yBkxXqK-cENlmlCCN-OQVAKJqDYoz4EgLhMFYwkjmjKk5rtxhQjDazKweX8-N421LJHVnBnhLV7nn3TdPuvT-0uz_KD0XINDU</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Darkfield inspection system having a programmable light selection array</title><source>esp@cenet</source><creator>SULLIVAN PAUL J ; KREN GEORGE J ; BEVIS CHRISTOPHER F ; SHORTT DAVID W</creator><creatorcontrib>SULLIVAN PAUL J ; KREN GEORGE J ; BEVIS CHRISTOPHER F ; SHORTT DAVID W</creatorcontrib><description>An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light selection array that receives light scattered from the workpiece and selectively directs the light scattered from defects onto a photosensor which detects the defect signal. Processing circuitry receives the defect signal and conducts surface analysis of the workpiece that can include the characterizing of defects of the workpiece. The programmable light selection arrays can include, but are not limited to, reflector arrays and filter arrays. The invention also includes associated surface inspection methods.</description><language>eng</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2006</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20060221&amp;DB=EPODOC&amp;CC=US&amp;NR=7002677B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20060221&amp;DB=EPODOC&amp;CC=US&amp;NR=7002677B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SULLIVAN PAUL J</creatorcontrib><creatorcontrib>KREN GEORGE J</creatorcontrib><creatorcontrib>BEVIS CHRISTOPHER F</creatorcontrib><creatorcontrib>SHORTT DAVID W</creatorcontrib><title>Darkfield inspection system having a programmable light selection array</title><description>An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light selection array that receives light scattered from the workpiece and selectively directs the light scattered from defects onto a photosensor which detects the defect signal. Processing circuitry receives the defect signal and conducts surface analysis of the workpiece that can include the characterizing of defects of the workpiece. The programmable light selection arrays can include, but are not limited to, reflector arrays and filter arrays. The invention also includes associated surface inspection methods.</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2006</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyjsOwjAMANAsDAi4gy-AVBWJ7Px3YK5McVML5yM7QurtWXoApre8pbueUD8Dk7yBkxXqK-cENlmlCCN-OQVAKJqDYoz4EgLhMFYwkjmjKk5rtxhQjDazKweX8-N421LJHVnBnhLV7nn3TdPuvT-0uz_KD0XINDU</recordid><startdate>20060221</startdate><enddate>20060221</enddate><creator>SULLIVAN PAUL J</creator><creator>KREN GEORGE J</creator><creator>BEVIS CHRISTOPHER F</creator><creator>SHORTT DAVID W</creator><scope>EVB</scope></search><sort><creationdate>20060221</creationdate><title>Darkfield inspection system having a programmable light selection array</title><author>SULLIVAN PAUL J ; KREN GEORGE J ; BEVIS CHRISTOPHER F ; SHORTT DAVID W</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US7002677B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2006</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>SULLIVAN PAUL J</creatorcontrib><creatorcontrib>KREN GEORGE J</creatorcontrib><creatorcontrib>BEVIS CHRISTOPHER F</creatorcontrib><creatorcontrib>SHORTT DAVID W</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SULLIVAN PAUL J</au><au>KREN GEORGE J</au><au>BEVIS CHRISTOPHER F</au><au>SHORTT DAVID W</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Darkfield inspection system having a programmable light selection array</title><date>2006-02-21</date><risdate>2006</risdate><abstract>An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light selection array that receives light scattered from the workpiece and selectively directs the light scattered from defects onto a photosensor which detects the defect signal. Processing circuitry receives the defect signal and conducts surface analysis of the workpiece that can include the characterizing of defects of the workpiece. The programmable light selection arrays can include, but are not limited to, reflector arrays and filter arrays. The invention also includes associated surface inspection methods.</abstract><oa>free_for_read</oa></addata></record>
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title Darkfield inspection system having a programmable light selection array
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-30T00%3A22%3A49IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SULLIVAN%20PAUL%20J&rft.date=2006-02-21&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS7002677B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true