Flash memory cell with UV protective layer

A method of protecting a charge trapping dielectric flash memory cell from UV-induced charging, including fabricating a charge trapping dielectric flash memory cell in a semiconductor device; depositing and planarizing an interlevel dielectric layer over the charge trapping dielectric flash memory c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEUNG PATRICK K, ACHUTHAN KRISHNASHREE, TABERY CYRUS, CHENG NING, NGO MINH VAN, YANG JEAN Y
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!