Pressure sensor

The invention relates to a pressure sensor comprising a sensor element ( 2 ) having a flat membrane ( 4 ) which is transformed at its edge into a hollow-cylindrical ring ( 6 ) so that a central recess ( 20 ) is provided at the lower side ( 10 ) of the membrane ( 4 ). On the upper side ( 8 ) of the m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUERST PETER, VONAU UWE, SPEIER NIKI, BALLMANN JOACHIM, LOHMEIER FRANZ-JOSEF, PLEYER JURGEN, TRUETZLER ANDREAS
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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