Damascene optical waveguides

A method for fabricating electromagnetic waveguides. The primary expected application is for the formation of dielectric type waveguides suitable for the confinement and guidance of intra-red and visible wavelengths. A secondary application is the formation of waveguides which can be filled with liq...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PALMATEER SUSAN C, MAKI PAUL A
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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