Sensing head positioning system using two-stage offset air bearings

Methods, apparatuses, and systems are presented for positioning a sensing head relative to a workpiece, involving a control unit operative to provide a plurality of control signals to iteratively control positioning of the sensing head relative to the workpiece, a plurality of air injectors disposed...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DANG THANH V, SAMPLE JEFFREY P, BALDWIN DAVID L, NAGY ALEXANDER J, HAWTHORNE JEFFREY A
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
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