Method of alternating grounded/floating poly lines to monitor shorts

A method for in-line testing of a chip to include multiple independent bit Flash memory devices, includes the steps of: grounding every other polysilicon line on the chip to emulate the multiple independent bit Flash memory devices, where an oxide line reside between every two polysilicon lines; sca...

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Bibliographische Detailangaben

Hauptverfasser:	TU AMY C, HILL W. EUGENE, DOAN SAMANTHA L
Format:	Patent
Sprache:	eng
Schlagworte:	INFORMATION STORAGE PHYSICS STATIC STORES
Online-Zugang:	Volltext bestellen
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