Microactuator having a ferromagnetic substrate

An electromagnetic microactuator having a ferromagnetic substrate, preferably steel. A plurality of layers are deposited upon the substrate including an insulating layer, a seed layer and first and second photoresist layers. The first photoresist layer provides a coil well which defines the depositi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PUTTY MICHAEL W, KEMPISTY JEFFREY M, HARRINGTON MARIE I, CHANG SHIHIA, EDDY DAVID STURGE
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY GENERATION
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