Method for lubricating MEMS components
The present invention provides, in one aspect, a method of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate. The method further includes coupling an assembly lid to the assembly substrate and over the...
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| creator | SMITH JACK C MILLER SETH MARSH JEFFREY W FISHER EDWARD C DENNIS WILLIAM KEVIN ADAMS LEA MALONE JOSH |
| description | The present invention provides, in one aspect, a method of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate. The method further includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes lubricating/passivating the MEMS device through the opening. In addition, a MEMS assembly constructed according to a process of the present invention is also disclosed. |
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In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate. The method further includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes lubricating/passivating the MEMS device through the opening. In addition, a MEMS assembly constructed according to a process of the present invention is also disclosed.</description><edition>7</edition><language>eng</language><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TRANSPORTING</subject><creationdate>2004</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20041019&DB=EPODOC&CC=US&NR=6806993B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20041019&DB=EPODOC&CC=US&NR=6806993B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SMITH JACK C</creatorcontrib><creatorcontrib>MILLER SETH</creatorcontrib><creatorcontrib>MARSH JEFFREY W</creatorcontrib><creatorcontrib>FISHER EDWARD C</creatorcontrib><creatorcontrib>DENNIS WILLIAM KEVIN</creatorcontrib><creatorcontrib>ADAMS LEA</creatorcontrib><creatorcontrib>MALONE JOSH</creatorcontrib><title>Method for lubricating MEMS components</title><description>The present invention provides, in one aspect, a method of manufacturing a MEMS assembly. 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In addition, a MEMS assembly constructed according to a process of the present invention is also disclosed.</description><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2004</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFDzTS3JyE9RSMsvUsgpTSrKTE4sycxLV_B19Q1WSM7PLcjPS80rKeZhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfGhwWYWBmaWlsZOhsZEKAEAC3wnIw</recordid><startdate>20041019</startdate><enddate>20041019</enddate><creator>SMITH JACK C</creator><creator>MILLER SETH</creator><creator>MARSH JEFFREY W</creator><creator>FISHER EDWARD C</creator><creator>DENNIS WILLIAM KEVIN</creator><creator>ADAMS LEA</creator><creator>MALONE JOSH</creator><scope>EVB</scope></search><sort><creationdate>20041019</creationdate><title>Method for lubricating MEMS components</title><author>SMITH JACK C ; MILLER SETH ; MARSH JEFFREY W ; FISHER EDWARD C ; DENNIS WILLIAM KEVIN ; ADAMS LEA ; MALONE JOSH</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US6806993B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2004</creationdate><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>SMITH JACK C</creatorcontrib><creatorcontrib>MILLER SETH</creatorcontrib><creatorcontrib>MARSH JEFFREY W</creatorcontrib><creatorcontrib>FISHER EDWARD C</creatorcontrib><creatorcontrib>DENNIS WILLIAM KEVIN</creatorcontrib><creatorcontrib>ADAMS LEA</creatorcontrib><creatorcontrib>MALONE JOSH</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SMITH JACK C</au><au>MILLER SETH</au><au>MARSH JEFFREY W</au><au>FISHER EDWARD C</au><au>DENNIS WILLIAM KEVIN</au><au>ADAMS LEA</au><au>MALONE JOSH</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method for lubricating MEMS components</title><date>2004-10-19</date><risdate>2004</risdate><abstract>The present invention provides, in one aspect, a method of manufacturing a MEMS assembly. In one embodiment, the method includes mounting a MEMS device, such as a MEMS mirror array, on an assembly substrate. The method further includes coupling an assembly lid to the assembly substrate and over the MEMS device to create an interior of the MEMS assembly housing the MEMS device, whereby the coupling maintains an opening to the interior of the MEMS assembly. Furthermore, the method includes lubricating/passivating the MEMS device through the opening. In addition, a MEMS assembly constructed according to a process of the present invention is also disclosed.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | Method for lubricating MEMS components |
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