Process-robust alignment mark structure for semiconductor wafers

An alignment mark structure for use upon a semiconductor substrate is disclosed. In an exemplary embodiment, the alignment mark structure includes a plurality of segments arranged in an alignment pattern, with each of the plurality of segments being formed from a base pattern created on the substrat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WU QIANG, HOLLOWAY KAREN L, LU ANDREW
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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