Unified apparatus and method to assure probe card-to-wafer parallelism in semiconductor automatic wafer test, probe card measurement systems, and probe card manufacturing

A planarization gauge assures probe card-to-wafer parallelism in semiconductor automatic test equipment (ATE) used for wafer test, and provides a standard system reference plane during the building and testing of ATE components. The planarization gauge has two planar and parallel surfaces that may s...

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Hauptverfasser:	KARKLIN KENNETH DEAN, SPRAGUE WILLIAM T, JAFARI NASSER ALI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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