Heterodyne interferometer with a phase modulated source

The present invention relates to a heterodyne interferometer system with a pre-processing of the target signal to isolate and remove self-interference signals using a known phase modulation of the carrier signal's frequency. Where self-interference signals do not include a time delay inherent i...

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1. Verfasser:	DUBOVITSKY SERGE
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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