Method of making a magnetic head with aligned pole tips

A magnetic head is fabricated by providing a substrate with a planar surface, forming at least one cavity in the planar substrate, depositing a second yoke layer in the cavity, forming a second pole tip in the cavity in contact with the second yoke layer, patterning an inductive coil in the cavity,...

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Bibliographische Detailangaben
Hauptverfasser: THOMAS MARK D, RAVIPATI DURGA P, CORONA CARLOS, JENSEN WILLIAM D, HUAI YIMING
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A magnetic head is fabricated by providing a substrate with a planar surface, forming at least one cavity in the planar substrate, depositing a second yoke layer in the cavity, forming a second pole tip in the cavity in contact with the second yoke layer, patterning an inductive coil in the cavity, depositing a gap layer over the second pole tip, sputtering a first pole tip over the gap layer, etching the first and second pole tips and the gap layer to form a stack of layers, depositing a protective layer over the stack of layers, leveling the protective layer to expose the first pole tip, and patterning a first yoke layer in contact with the first pole tip.