Hybrid ceramic electrostatic clamp

The invention is a hybrid chuck for securing workpieces with an electrostatic charge. The hybrid chuck includes a dielectric base for supporting the hybrid chuck. The dielectric base has a top surface and a conductive layer covers at least a portion of the top surface of the dielectric base. The con...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOMPKINS ROBERT E, LOGAN JOSEPH, MILLER JOHN R, NAIM MAHMOOD
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION
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