Ultraviolet cleaning apparatus of a substrate and the method thereof
An ultraviolet cleaning apparatus wherein a substrate is pre-heated prior to a conveyance of the substrate into the cleaning apparatus to thereby shorten the process time. In the apparatus, a substrate pre-heater pre-heats the substrate. An ultraviolet cleaner irradiates ultraviolet rays onto the su...
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| creator | YUN HEON DO |
| description | An ultraviolet cleaning apparatus wherein a substrate is pre-heated prior to a conveyance of the substrate into the cleaning apparatus to thereby shorten the process time. In the apparatus, a substrate pre-heater pre-heats the substrate. An ultraviolet cleaner irradiates ultraviolet rays onto the substrate to remove the remaining substances on the substrate. |
| format | Patent |
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In the apparatus, a substrate pre-heater pre-heats the substrate. An ultraviolet cleaner irradiates ultraviolet rays onto the substrate to remove the remaining substances on the substrate.</description><edition>7</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CLEANING ; CLEANING IN GENERAL ; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FREQUENCY-CHANGING ; NON-LINEAR OPTICS ; OPTICAL ANALOGUE/DIGITAL CONVERTERS ; OPTICAL LOGIC ELEMENTS ; OPTICS ; PERFORMING OPERATIONS ; PHYSICS ; PREVENTION OF FOULING IN GENERAL ; SEMICONDUCTOR DEVICES ; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF ; TRANSPORTING</subject><creationdate>2004</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040127&DB=EPODOC&CC=US&NR=6683312B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040127&DB=EPODOC&CC=US&NR=6683312B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YUN HEON DO</creatorcontrib><title>Ultraviolet cleaning apparatus of a substrate and the method thereof</title><description>An ultraviolet cleaning apparatus wherein a substrate is pre-heated prior to a conveyance of the substrate into the cleaning apparatus to thereby shorten the process time. 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In the apparatus, a substrate pre-heater pre-heats the substrate. An ultraviolet cleaner irradiates ultraviolet rays onto the substrate to remove the remaining substances on the substrate.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING |
| title | Ultraviolet cleaning apparatus of a substrate and the method thereof |
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