Fill pattern inspection

Fill pattern inspection system and method where the fill patterns are inspected to a different criteria than the primary pattern or not inspected at all. The fill pattern images are marked such that they may be identified by easily recognizable shapes or designations to avoid unnecessary inspections...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BEHUN J. RICHARD, SMOLINSKI JACEK G
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
Online-Zugang:	Volltext bestellen
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