Thermal stable low elastic modulus material and device using the same

The present invention provides a thermal stable low elastic modulus material, which has high thermal stability, is little in change in dynamic characteristics such as coefficient of thermal expansion and elastic modulus within a temperature of -50° C. to 300° C., has an elastic modulus at room tempe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UENO TAKUMI, SATSU YUICHI, SUZUKI KAZUHIRO, YAMADA SHINJI, TAKAHASHI AKIO, SATOH TOSHIYA, UMINO MORIMICHI, NAGAI AKIRA
Format: Patent
Sprache:eng
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