Method and device for semiconductor testing using electrically conductive adhesives

A method and device for testing and burning-in semiconductor circuits. The method and device permit the entire wafer to be tested by temporarily attaching the wafer to a test substrate using electrically conductive adhesive (ECA). The ECA conforms to deviations from co-planarity of the contact point...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: GAYNES MICHAEL A, PIERSON MARK V, WOYCHIK CHARLES G, TRIVEDI AJIT K, HOWELL WAYNE J, BERNIER WILLIAM E
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!