High precision alignment of optical waveguide features

A method of manufacturing a planar or integrated optical circuit in which a core layer (20) is formed on a substrate (10) and patterned to define optical features (such as waveguides) using a mask having a first portion (30) defining the desired core patterns (20a) and a second portion (35) correspo...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	BEGUIN ALAIN M. J
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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