Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatus

A chemical filter unit 10 is made of a chemical filter 12 and a filter life detection sensor 1. The filter life detection sensor 1 is provided with an adsorption state detection sensor 3 and a reference sensor 4 to which a flow of air is blocked. The sensors 3 and 4 are made of the same filter mater...

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Bibliographische Detailangaben
Hauptverfasser:	SAITO MISAKO, HAYASHI TERUYUKI, MOTOUJI SATOSHI, HIRAO IICHI
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING MEASURING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS RANGES SEMICONDUCTOR DEVICES SEPARATION TESTING TRANSPORTING VENTILATING WEAPONS
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Beschreibung
Zusammenfassung:	A chemical filter unit 10 is made of a chemical filter 12 and a filter life detection sensor 1. The filter life detection sensor 1 is provided with an adsorption state detection sensor 3 and a reference sensor 4 to which a flow of air is blocked. The sensors 3 and 4 are made of the same filter material as the chemical filter 12 with a pair of electrodes sandwiching the filter material. An oscillation circuit, in which the sensors 3 and 4 constitute a part of the oscillating conditions, detects changes in impedance of the sensors 3 and 4 based on the changes in oscillation frequencies. A measurement of the adsorption state detection sensor 3 is corrected with a measurement of the reference sensor 4 in order to remove effects of temperature and humidity, obtain a measurement corresponding to the amount of adsorption of chemical substances, and decide on the timing of replacing the chemical filter based on the corrected measurement.