Plume shield for ion accelerators

A series of long slats, preferably parallel and spaced apart uniformly, extend from a base plate to form a series of cavities between the slats for trapping high energy ions in the exit plume of an ion accelerator. The plume shield is designed to minimize escape of ions and sputtered atoms from the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TILLEY DENNIS L, KING DAVID Q
Format: Patent
Sprache:eng
Schlagworte:
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