Method to prevent charging effects in electrostatic devices

Method to prevent charging effects in electrostatic devices

The present invention significantly reduces charging effects in electrostatic devices due to charge accumulation in or on the insulating materials on the active surfaces of the devices. This has been achieved by replacing the dielectric material that is normally present between the force generating...

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Hauptverfasser: CHEONG HUI WING, SAMPER VICTOR DONALD, HUA FENG HAN, KNUEPPEL OLAF, SRIDHAR UPPILI
Format: Patent
Sprache:eng
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CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
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creator CHEONG HUI WING
SAMPER VICTOR DONALD
HUA FENG HAN
KNUEPPEL OLAF
SRIDHAR UPPILI
description The present invention significantly reduces charging effects in electrostatic devices due to charge accumulation in or on the insulating materials on the active surfaces of the devices. This has been achieved by replacing the dielectric material that is normally present between the force generating conductor surfaces with a semi-insulating material. This semi-insulating film overcomes the effects of charging, while avoiding short-circuits when the surfaces are pulled into contact. It is not subject to insulation breakdown within the range of voltages used to operate the device. Examples of semi-insulating materials that may be used are semi-insulating polysilicon (SIPOS) and silicon rich silicon nitride.
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subjects CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
title Method to prevent charging effects in electrostatic devices
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