Design of a variable attenuator and fabrication of its shutter element

A variable attenuator employs a shutter element that is inserted into the path of a beam of radiation. The shutter element comprises a transparent substrate with an opaque layer formed on top of the substrate. The opaque layer forms a pattern in the shape of dots on one part of the substrate and in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JONES PETER, BIRMAN ALEX, LEE HO-SHANG, SHOU NATHAN, CHAI STEPHEN
Format: Patent
Sprache:eng
Schlagworte:
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