Method and apparatus for inspection of a substrate by use of a ring illuminator

A method and apparatus for the inspection of a substrate provides consistent detection of defects such as cracks, differentiates between different types of defects, and, does not excessively heat the substrate. An infrared radiating source produces infrared energy which illuminates the substrate in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHOU MAU-SONG, CHODZKO RICHARD A, CASEMENT L. SUZANNE, ARENBERG JONATHAN W
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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