Method and apparatus for inspection of a substrate by use of a ring illuminator
A method and apparatus for the inspection of a substrate provides consistent detection of defects such as cracks, differentiates between different types of defects, and, does not excessively heat the substrate. An infrared radiating source produces infrared energy which illuminates the substrate in...
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| creator | CHOU MAU-SONG CHODZKO RICHARD A CASEMENT L. SUZANNE ARENBERG JONATHAN W |
| description | A method and apparatus for the inspection of a substrate provides consistent detection of defects such as cracks, differentiates between different types of defects, and, does not excessively heat the substrate. An infrared radiating source produces infrared energy which illuminates the substrate in a uniform manner at an incident angle. An infrared camera collects a portion of the infrared light which is reflected from the substrate. An image is created from the collected light which includes indicia of the defect. The image is examined as the incident angle is varied for changes in the appearance of the indicia. |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | Method and apparatus for inspection of a substrate by use of a ring illuminator |
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