Methods and apparatus for improving resolution and reducing noise in an image detector for an electron microscope

Methods and apparatus are provided which improve the performance of electron imaging detectors by reducing the total interaction volume of the detector and/or reducing the energy converting volume of the detector. In one embodiment, a method for improving resolution and reducing noise in an imaging...

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Bibliographische Detailangaben
Hauptverfasser: MOONEY PAUL E, HUNT JOHN A
Format: Patent
Sprache:eng
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