Method for determining opened/unopened semiconductor contacts using a scanning electron microscope

A method for inspecting a plurality of similar structures in the surface of a workpiece includes providing a workpiece having a plurality of regions, each of the regions including at least two different materials, generating an image from each of the regions such that an image contrast between the t...

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Bibliographische Detailangaben

1. Verfasser:	BOWLEY, JR. REGINALD R
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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