Fluid-encapsulated MEMS optical switch

A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the ligh...

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Hauptverfasser:	CHAMBERLAIN DAROL, EID BERNARD, BROPHY CHRISTOPHER PHILIP, EDWARDS VICTORIA ANN
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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creator	CHAMBERLAIN DAROL EID BERNARD BROPHY CHRISTOPHER PHILIP EDWARDS VICTORIA ANN
description	A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art. In particular, the MEMS mirror disclosed in the present invention is reduced to approximately 15 mum wide and 2 mum thick, resulting in shorter actuation distances of approximately 15 mum. This feature results in an optical switch having faster switching times.
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fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US6404942B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US6404942B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US6404942B13</originalsourceid><addsrcrecordid>eNrjZFBzyynNTNFNzUtOLCguzUksSU1R8HX1DVbILyjJTE7MUSguzyxJzuBhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfGhwWYmBiaWJkZOhsZEKAEAB64nAQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Fluid-encapsulated MEMS optical switch</title><source>esp@cenet</source><creator>CHAMBERLAIN DAROL ; EID BERNARD ; BROPHY CHRISTOPHER PHILIP ; EDWARDS VICTORIA ANN</creator><creatorcontrib>CHAMBERLAIN DAROL ; EID BERNARD ; BROPHY CHRISTOPHER PHILIP ; EDWARDS VICTORIA ANN</creatorcontrib><description>A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art. In particular, the MEMS mirror disclosed in the present invention is reduced to approximately 15 mum wide and 2 mum thick, resulting in shorter actuation distances of approximately 15 mum. This feature results in an optical switch having faster switching times.</description><edition>7</edition><language>eng</language><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PERFORMING OPERATIONS ; PHYSICS ; TRANSPORTING</subject><creationdate>2002</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020611&DB=EPODOC&CC=US&NR=6404942B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020611&DB=EPODOC&CC=US&NR=6404942B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHAMBERLAIN DAROL</creatorcontrib><creatorcontrib>EID BERNARD</creatorcontrib><creatorcontrib>BROPHY CHRISTOPHER PHILIP</creatorcontrib><creatorcontrib>EDWARDS VICTORIA ANN</creatorcontrib><title>Fluid-encapsulated MEMS optical switch</title><description>A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art. In particular, the MEMS mirror disclosed in the present invention is reduced to approximately 15 mum wide and 2 mum thick, resulting in shorter actuation distances of approximately 15 mum. This feature results in an optical switch having faster switching times.</description><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2002</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFBzyynNTNFNzUtOLCguzUksSU1R8HX1DVbILyjJTE7MUSguzyxJzuBhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfGhwWYmBiaWJkZOhsZEKAEAB64nAQ</recordid><startdate>20020611</startdate><enddate>20020611</enddate><creator>CHAMBERLAIN DAROL</creator><creator>EID BERNARD</creator><creator>BROPHY CHRISTOPHER PHILIP</creator><creator>EDWARDS VICTORIA ANN</creator><scope>EVB</scope></search><sort><creationdate>20020611</creationdate><title>Fluid-encapsulated MEMS optical switch</title><author>CHAMBERLAIN DAROL ; EID BERNARD ; BROPHY CHRISTOPHER PHILIP ; EDWARDS VICTORIA ANN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US6404942B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2002</creationdate><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CHAMBERLAIN DAROL</creatorcontrib><creatorcontrib>EID BERNARD</creatorcontrib><creatorcontrib>BROPHY CHRISTOPHER PHILIP</creatorcontrib><creatorcontrib>EDWARDS VICTORIA ANN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHAMBERLAIN DAROL</au><au>EID BERNARD</au><au>BROPHY CHRISTOPHER PHILIP</au><au>EDWARDS VICTORIA ANN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Fluid-encapsulated MEMS optical switch</title><date>2002-06-11</date><risdate>2002</risdate><abstract>A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art. In particular, the MEMS mirror disclosed in the present invention is reduced to approximately 15 mum wide and 2 mum thick, resulting in shorter actuation distances of approximately 15 mum. This feature results in an optical switch having faster switching times.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
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subjects	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
title	Fluid-encapsulated MEMS optical switch
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