Method for producing a metal layer with a given thickness

A method for producing a metal layer with a given thickness includes the step of measuring an electrical resistance of the metal layer via connections on a starting layer provided under the metal layer. The resistance measurement is performed during or after the deposition of the metal layer. The la...

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Bibliographische Detailangaben
Hauptverfasser: NICHTERWITZ MARION, RUF ALEXANDER
Format: Patent
Sprache:eng
Schlagworte:
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