Microactuator suspension with multiple narrow beams
A microactuator suspension having a stator portion for connection to a gimbal, a rotor portion for connection to a slider and a plurality of microbeams connected therebetween. The microbeams have an aspect ratio of 30:1, 60:1, 90:1, 120:1 or more. The microbeams may be manufactured from a material t...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A microactuator suspension having a stator portion for connection to a gimbal, a rotor portion for connection to a slider and a plurality of microbeams connected therebetween. The microbeams have an aspect ratio of 30:1, 60:1, 90:1, 120:1 or more. The microbeams may be manufactured from a material that is different than the material of the stator, such as Titanium, Tungsten, Molybdenum, Nickel or Silicon Nitride. |
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