Thin film transistors

The specification describes thin film transistor integrated circuits wherein the TFT devices are field effect transistors with inverted structures. The interconnect levels are produced prior to the formation of the transistors. This structure leads to added flexibility in processing. The inverted st...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DODABALAPUR ANANTH, LIN YEN-YI, RAJU VENKATARAM REDDY
Format: Patent
Sprache:eng
Schlagworte:
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