Wafer having top and bottom emitting vertical-cavity lasers

A technique is described for determining the performance of substrate-side emitting VCSELs formed on a wafer. The technique involves forming top-emitting VCSELs on the same wafer as bottom-emitting VCSELs and then testing the top-emitting VCSELs and using the results to determine the performance of...

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Bibliographische Detailangaben
Hauptverfasser: GOOSSEN KEITH WAYNE, TSENG BETTY JYUE, HUI SANGHEE PARK, CHIROVSKY LEO MARIA, CUNNINGHAM JOHN EDWARD
Format: Patent
Sprache:eng
Schlagworte:
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