Integral machine for polishing, cleaning, rinsing and drying workpieces
An integral machine for polishing, cleaning, rinsing and drying workpieces such as semiconductor wafers. A load/unload station has a plurality of platforms for receiving cassettes of wafers to be processed. A dry end-effector of a robot retrieves wafers from the cassettes and transfers them to an in...
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| creator | THORNTON BILL ALLEN ROBERT MACERNIE JON CUNNANE JEFF JORDAN TOBY GONZALEZ-MARTIN JOSE R KARLSRUD CHRIS HAMER ARTHUR GOPALAN PERIYA HOWARD CRAIG CALDERON FERNANDO |
| description | An integral machine for polishing, cleaning, rinsing and drying workpieces such as semiconductor wafers. A load/unload station has a plurality of platforms for receiving cassettes of wafers to be processed. A dry end-effector of a robot retrieves wafers from the cassettes and transfers them to an index table. A transfer apparatus having wafer carrier elements picks up wafers from the index table, moves the wafers to a polishing table for polishing, and returns the wafers to the index table for further processing. A flipper moves the polished wafers to a cleaning station. The cleaning station includes scrub stations, a rinsing station and a spin dryer station, and a connective system of water tracks. A wet end-effector of the robot transfers rinsed wafers to the spin dryer station. The dry end-effector of the robot moves dried wafers from the spin dryer station back to the cassette of origination. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US6213853B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US6213853B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US6213853B13</originalsourceid><addsrcrecordid>eNrjZHD3zCtJTS9KzFHITUzOyMxLVUjLL1IoyM_JLAby0nUUknNSE_PArKLMvGIgQyExL0UhpagSxCzPL8ouyExNTi3mYWBNS8wpTuWF0twMCm6uIc4euqkF-fGpxQWJyal5qSXxocFmRobGFqbGTobGRCgBAPuwM6Q</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Integral machine for polishing, cleaning, rinsing and drying workpieces</title><source>esp@cenet</source><creator>THORNTON BILL ; ALLEN ROBERT ; MACERNIE JON ; CUNNANE JEFF ; JORDAN TOBY ; GONZALEZ-MARTIN JOSE R ; KARLSRUD CHRIS ; HAMER ARTHUR ; GOPALAN PERIYA ; HOWARD CRAIG ; CALDERON FERNANDO</creator><creatorcontrib>THORNTON BILL ; ALLEN ROBERT ; MACERNIE JON ; CUNNANE JEFF ; JORDAN TOBY ; GONZALEZ-MARTIN JOSE R ; KARLSRUD CHRIS ; HAMER ARTHUR ; GOPALAN PERIYA ; HOWARD CRAIG ; CALDERON FERNANDO</creatorcontrib><description>An integral machine for polishing, cleaning, rinsing and drying workpieces such as semiconductor wafers. A load/unload station has a plurality of platforms for receiving cassettes of wafers to be processed. A dry end-effector of a robot retrieves wafers from the cassettes and transfers them to an index table. A transfer apparatus having wafer carrier elements picks up wafers from the index table, moves the wafers to a polishing table for polishing, and returns the wafers to the index table for further processing. A flipper moves the polished wafers to a cleaning station. The cleaning station includes scrub stations, a rinsing station and a spin dryer station, and a connective system of water tracks. A wet end-effector of the robot transfers rinsed wafers to the spin dryer station. The dry end-effector of the robot moves dried wafers from the spin dryer station back to the cassette of origination.</description><edition>7</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CONVEYING ; DRESSING OR CONDITIONING OF ABRADING SURFACES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ; GRINDING ; HANDLING THIN OR FILAMENTARY MATERIAL ; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING ; PACKING ; PERFORMING OPERATIONS ; PNEUMATIC TUBE CONVEYORS ; POLISHING ; SEMICONDUCTOR DEVICES ; SHOP CONVEYOR SYSTEMS ; STORING ; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING ; TRANSPORTING</subject><creationdate>2001</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20010410&DB=EPODOC&CC=US&NR=6213853B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20010410&DB=EPODOC&CC=US&NR=6213853B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>THORNTON BILL</creatorcontrib><creatorcontrib>ALLEN ROBERT</creatorcontrib><creatorcontrib>MACERNIE JON</creatorcontrib><creatorcontrib>CUNNANE JEFF</creatorcontrib><creatorcontrib>JORDAN TOBY</creatorcontrib><creatorcontrib>GONZALEZ-MARTIN JOSE R</creatorcontrib><creatorcontrib>KARLSRUD CHRIS</creatorcontrib><creatorcontrib>HAMER ARTHUR</creatorcontrib><creatorcontrib>GOPALAN PERIYA</creatorcontrib><creatorcontrib>HOWARD CRAIG</creatorcontrib><creatorcontrib>CALDERON FERNANDO</creatorcontrib><title>Integral machine for polishing, cleaning, rinsing and drying workpieces</title><description>An integral machine for polishing, cleaning, rinsing and drying workpieces such as semiconductor wafers. A load/unload station has a plurality of platforms for receiving cassettes of wafers to be processed. A dry end-effector of a robot retrieves wafers from the cassettes and transfers them to an index table. A transfer apparatus having wafer carrier elements picks up wafers from the index table, moves the wafers to a polishing table for polishing, and returns the wafers to the index table for further processing. A flipper moves the polished wafers to a cleaning station. The cleaning station includes scrub stations, a rinsing station and a spin dryer station, and a connective system of water tracks. A wet end-effector of the robot transfers rinsed wafers to the spin dryer station. The dry end-effector of the robot moves dried wafers from the spin dryer station back to the cassette of origination.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CONVEYING</subject><subject>DRESSING OR CONDITIONING OF ABRADING SURFACES</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS</subject><subject>GRINDING</subject><subject>HANDLING THIN OR FILAMENTARY MATERIAL</subject><subject>MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING</subject><subject>PACKING</subject><subject>PERFORMING OPERATIONS</subject><subject>PNEUMATIC TUBE CONVEYORS</subject><subject>POLISHING</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SHOP CONVEYOR SYSTEMS</subject><subject>STORING</subject><subject>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2001</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHD3zCtJTS9KzFHITUzOyMxLVUjLL1IoyM_JLAby0nUUknNSE_PArKLMvGIgQyExL0UhpagSxCzPL8ouyExNTi3mYWBNS8wpTuWF0twMCm6uIc4euqkF-fGpxQWJyal5qSXxocFmRobGFqbGTobGRCgBAPuwM6Q</recordid><startdate>20010410</startdate><enddate>20010410</enddate><creator>THORNTON BILL</creator><creator>ALLEN ROBERT</creator><creator>MACERNIE JON</creator><creator>CUNNANE JEFF</creator><creator>JORDAN TOBY</creator><creator>GONZALEZ-MARTIN JOSE R</creator><creator>KARLSRUD CHRIS</creator><creator>HAMER ARTHUR</creator><creator>GOPALAN PERIYA</creator><creator>HOWARD CRAIG</creator><creator>CALDERON FERNANDO</creator><scope>EVB</scope></search><sort><creationdate>20010410</creationdate><title>Integral machine for polishing, cleaning, rinsing and drying workpieces</title><author>THORNTON BILL ; ALLEN ROBERT ; MACERNIE JON ; CUNNANE JEFF ; JORDAN TOBY ; GONZALEZ-MARTIN JOSE R ; KARLSRUD CHRIS ; HAMER ARTHUR ; GOPALAN PERIYA ; HOWARD CRAIG ; CALDERON FERNANDO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US6213853B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2001</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CONVEYING</topic><topic>DRESSING OR CONDITIONING OF ABRADING SURFACES</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS</topic><topic>GRINDING</topic><topic>HANDLING THIN OR FILAMENTARY MATERIAL</topic><topic>MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING</topic><topic>PACKING</topic><topic>PERFORMING OPERATIONS</topic><topic>PNEUMATIC TUBE CONVEYORS</topic><topic>POLISHING</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SHOP CONVEYOR SYSTEMS</topic><topic>STORING</topic><topic>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>THORNTON BILL</creatorcontrib><creatorcontrib>ALLEN ROBERT</creatorcontrib><creatorcontrib>MACERNIE JON</creatorcontrib><creatorcontrib>CUNNANE JEFF</creatorcontrib><creatorcontrib>JORDAN TOBY</creatorcontrib><creatorcontrib>GONZALEZ-MARTIN JOSE R</creatorcontrib><creatorcontrib>KARLSRUD CHRIS</creatorcontrib><creatorcontrib>HAMER ARTHUR</creatorcontrib><creatorcontrib>GOPALAN PERIYA</creatorcontrib><creatorcontrib>HOWARD CRAIG</creatorcontrib><creatorcontrib>CALDERON FERNANDO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>THORNTON BILL</au><au>ALLEN ROBERT</au><au>MACERNIE JON</au><au>CUNNANE JEFF</au><au>JORDAN TOBY</au><au>GONZALEZ-MARTIN JOSE R</au><au>KARLSRUD CHRIS</au><au>HAMER ARTHUR</au><au>GOPALAN PERIYA</au><au>HOWARD CRAIG</au><au>CALDERON FERNANDO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Integral machine for polishing, cleaning, rinsing and drying workpieces</title><date>2001-04-10</date><risdate>2001</risdate><abstract>An integral machine for polishing, cleaning, rinsing and drying workpieces such as semiconductor wafers. A load/unload station has a plurality of platforms for receiving cassettes of wafers to be processed. A dry end-effector of a robot retrieves wafers from the cassettes and transfers them to an index table. A transfer apparatus having wafer carrier elements picks up wafers from the index table, moves the wafers to a polishing table for polishing, and returns the wafers to the index table for further processing. A flipper moves the polished wafers to a cleaning station. The cleaning station includes scrub stations, a rinsing station and a spin dryer station, and a connective system of water tracks. A wet end-effector of the robot transfers rinsed wafers to the spin dryer station. The dry end-effector of the robot moves dried wafers from the spin dryer station back to the cassette of origination.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | BASIC ELECTRIC ELEMENTS CONVEYING DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING HANDLING THIN OR FILAMENTARY MATERIAL MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS POLISHING SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
| title | Integral machine for polishing, cleaning, rinsing and drying workpieces |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T05%3A01%3A13IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=THORNTON%20BILL&rft.date=2001-04-10&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS6213853B1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |