Method of high purity silane preparation

A process for the preparation of high purity silane, suitable for forming thin layer silicon structures in various semiconductor devices and high purity poly- and single crystal silicon for a variety of applications, is provided. Synthesis of high-purity silane starts with a temperature assisted rea...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BELOV, EUGENE P, CHERNYSHEV, EUGENE A, LEBEDEV, EUGENE N, KORNEEV, NIKOLAI N, KLESCHEVNIKOVA, SOLOMONIDA I, PINOV, AKHSARBEK B, ZADDE, VITALI V, RYABENKO, GERLIVANOV, VADIM G, STREBKOV, DMITRY S, TSUO, Y. SIMON
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMPOUNDS THEREOF GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!