Micro mass flow control apparatus and method

A micro mass flow controller is provided to accurately and reliably control or meter a mass flow rate of gas flowing at very low rates. The flow controller includes a sonic choked flow restriction with an oscillateable valve that is operable to repetitiously open and close the flow restriction in a...

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Bibliographische Detailangaben
Hauptverfasser:	BALSLEY, JR., RICHARD B, MILLER, CHARLES E, WYSS, JERRY C
Format:	Patent
Sprache:	eng
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS CONTROLLING DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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