Inspection equipment using small-angle topography in determining an object's internal structure and composition

Devices for X-ray topography determine structures and compositions of objects. In accordance with an embodiment of the invention, a scanning system forms images using small angle scattering. A spatial filter selects radiation an object scatters at small angles and blocks other radiation. A coordinat...

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Bibliographische Detailangaben
Hauptverfasser: LAWRENCE, ALBERT F, LAZAREV, PAVEL I, KOMARDIN, OLEG V
Format: Patent
Sprache:eng
Schlagworte:
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