Automatic fluorine control system

An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber. A manifold and feedback control system is provided to permit precise injection at rates approaching continuous fluorine injection. The...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CARLESI, JASON R, DAS, PALASH P, PATTERSON, DANIEL G, TANTRA, MULJADI, GONG, MENGXIONG, WATSON, TOM A, BINDER, MICHAEL C, ROKNI, SHAHRYAR, TAMMADGE, DAVID J
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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