Temperature calibration substrate

An apparatus for measuring the temperature of an object within a process chamber is described. The process chamber includes a platform for receiving the object and an energy source for transferring energy to the object. The apparatus includes a shield, and a first and second energy sensor. The shiel...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VANDENABEELE, PETER MICHEL NOEL, RENKEN, WAYNE GLENN
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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