Forced plug processing for high aspect ratio structures

A forced plug process for high aspect ratio structures. The process comprises the steps of providing a liquid plug in a high aspect ratio structure; increasing a gas pressure to force the liquid plug down into the high aspect ratio structure; and suddenly decreasing the gas pressure allowing the liq...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SYVERSON, WILLIAM, PIERSON, BERNADETTE, GALE, GLENN W
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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