Method of planarizing a curved substrate and resulting structure

According to the present invention a technique for providing a planarized substrate with dendritic connections of solder balls, especially a multi-layer ceramic substrate is provided. In the case where the substrate has a raised central portion on the top surface on which are disposed top surface me...

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Hauptverfasser: DOWNES, JR., FRANCIS JOSEPH, FUERNISS, STEPHEN JOSEPH, HILL, GARY RAY, MOLLA, JAYNAL ABEDIN, INGRAHAM, ANTHONY PAUL, MARKOVICH, VOYA RISTA
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creator DOWNES, JR.
FRANCIS JOSEPH
FUERNISS
STEPHEN JOSEPH
HILL
GARY RAY
MOLLA
JAYNAL ABEDIN
INGRAHAM
ANTHONY PAUL
MARKOVICH
VOYA RISTA
description According to the present invention a technique for providing a planarized substrate with dendritic connections of solder balls, especially a multi-layer ceramic substrate is provided. In the case where the substrate has a raised central portion on the top surface on which are disposed top surface metallurgy pads, a layer of conformable photoimagable material is placed over the top surface. The photoimagable material is exposed and developed in a pattern corresponding to the pattern of the top surface metallurgy pads to form vias in the photoimagable material. Copper is plated in the vias in contact with the top surface metallurgy pads. The exposed surface of the photoimagable surface is then planarized, preferably by mechanical polishing to form a flat planar surface, with the ends of the vias exposed. Dendritic connector pads are then grown on the exposed ends of the vias to which solder ball connections of an I/C chip are releasably connected.
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subjects BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
title Method of planarizing a curved substrate and resulting structure
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