Wafer image (ADS) vision system to automated dimensioning equipment (ADE) communication interface system

In a semiconductor manufacturing process in which wafers are analyzed using a wafer image (ADS) vision system and automated dimensioning equipment (ADE), an automated communication interface system is provided. The interface system uses a programmable logic controller in combination with relays to c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CANN, SCOTT ALAN, BUCHANAN, CURTIS PAUL, PAINE, THOMAS READ
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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