Process for manufacturing a sensor

An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second el...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OFFENBERG, MICHAEL, SCHUBERT, DIETRICH, BOEHRINGER, ALEXANDRA, HEYERS, KLAUS, MUENZEL, HORST, LUTZ, MARKUS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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