Process for manufacturing a sensor
An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second el...
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| creator | OFFENBERG MICHAEL SCHUBERT DIETRICH BOEHRINGER ALEXANDRA HEYERS KLAUS MUENZEL HORST LUTZ MARKUS |
| description | An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US5723353A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US5723353A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US5723353A3</originalsourceid><addsrcrecordid>eNrjZFAKKMpPTi0uVkjLL1LITcwrTUtMLiktysxLV0hUKE7NK84v4mFgTUvMKU7lhdLcDPJuriHOHrqpBfnxqcUFicmpeakl8aHBpuZGxsamxo7GhFUAAC_DJYA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Process for manufacturing a sensor</title><source>esp@cenet</source><creator>OFFENBERG; MICHAEL ; SCHUBERT; DIETRICH ; BOEHRINGER; ALEXANDRA ; HEYERS; KLAUS ; MUENZEL; HORST ; LUTZ; MARKUS</creator><creatorcontrib>OFFENBERG; MICHAEL ; SCHUBERT; DIETRICH ; BOEHRINGER; ALEXANDRA ; HEYERS; KLAUS ; MUENZEL; HORST ; LUTZ; MARKUS</creatorcontrib><description>An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system.</description><edition>6</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT ; MEASURING ; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK ; PHYSICS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>1998</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19980303&DB=EPODOC&CC=US&NR=5723353A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19980303&DB=EPODOC&CC=US&NR=5723353A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OFFENBERG; MICHAEL</creatorcontrib><creatorcontrib>SCHUBERT; DIETRICH</creatorcontrib><creatorcontrib>BOEHRINGER; ALEXANDRA</creatorcontrib><creatorcontrib>HEYERS; KLAUS</creatorcontrib><creatorcontrib>MUENZEL; HORST</creatorcontrib><creatorcontrib>LUTZ; MARKUS</creatorcontrib><title>Process for manufacturing a sensor</title><description>An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</subject><subject>MEASURING</subject><subject>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1998</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAKKMpPTi0uVkjLL1LITcwrTUtMLiktysxLV0hUKE7NK84v4mFgTUvMKU7lhdLcDPJuriHOHrqpBfnxqcUFicmpeakl8aHBpuZGxsamxo7GhFUAAC_DJYA</recordid><startdate>19980303</startdate><enddate>19980303</enddate><creator>OFFENBERG; MICHAEL</creator><creator>SCHUBERT; DIETRICH</creator><creator>BOEHRINGER; ALEXANDRA</creator><creator>HEYERS; KLAUS</creator><creator>MUENZEL; HORST</creator><creator>LUTZ; MARKUS</creator><scope>EVB</scope></search><sort><creationdate>19980303</creationdate><title>Process for manufacturing a sensor</title><author>OFFENBERG; MICHAEL ; SCHUBERT; DIETRICH ; BOEHRINGER; ALEXANDRA ; HEYERS; KLAUS ; MUENZEL; HORST ; LUTZ; MARKUS</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US5723353A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1998</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</topic><topic>MEASURING</topic><topic>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>OFFENBERG; MICHAEL</creatorcontrib><creatorcontrib>SCHUBERT; DIETRICH</creatorcontrib><creatorcontrib>BOEHRINGER; ALEXANDRA</creatorcontrib><creatorcontrib>HEYERS; KLAUS</creatorcontrib><creatorcontrib>MUENZEL; HORST</creatorcontrib><creatorcontrib>LUTZ; MARKUS</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OFFENBERG; MICHAEL</au><au>SCHUBERT; DIETRICH</au><au>BOEHRINGER; ALEXANDRA</au><au>HEYERS; KLAUS</au><au>MUENZEL; HORST</au><au>LUTZ; MARKUS</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Process for manufacturing a sensor</title><date>1998-03-03</date><risdate>1998</risdate><abstract>An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | Process for manufacturing a sensor |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-30T10%3A45%3A02IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=OFFENBERG;%20MICHAEL&rft.date=1998-03-03&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS5723353A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |