High precision calibration and feature measurement system for a scanning probe microscope
The present invention allows for calibration of a scanning probe microscope under computer control. The present invention comprehends either the removal of nonlinear artifacts in the microscope output data after measurement has been taken (a off-line process), or the correction of nonlinear movement...
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| creator | LOHR JASON D CHERNOFF DONALD A |
| description | The present invention allows for calibration of a scanning probe microscope under computer control. The present invention comprehends either the removal of nonlinear artifacts in the microscope output data after measurement has been taken (a off-line process), or the correction of nonlinear movements in the microscope scanner such that the scanner moves in a linear fashion during measurement (a realtime process). The realtime process may be operated in both an open-loop and a closed-loop process. The processes of the present invention uses an average cross-section of the scan in order to simplify the calculation and to improve the signal-to-noise ratio. Interpolation methods and centroid calculations are used to locate features on the scanned sample to subpixel precision. Comparison of the measured scan feature positions with the known topography of the scanned calibration specimen enable the present invention to assemble a calibrated length scale which may be used to correct individual feature positions in a full two-dimensional scan, each scan line in a two-dimensional image, or an average cross-section of the two-dimensional scan. |
| format | Patent |
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The present invention comprehends either the removal of nonlinear artifacts in the microscope output data after measurement has been taken (a off-line process), or the correction of nonlinear movements in the microscope scanner such that the scanner moves in a linear fashion during measurement (a realtime process). The realtime process may be operated in both an open-loop and a closed-loop process. The processes of the present invention uses an average cross-section of the scan in order to simplify the calculation and to improve the signal-to-noise ratio. Interpolation methods and centroid calculations are used to locate features on the scanned sample to subpixel precision. Comparison of the measured scan feature positions with the known topography of the scanned calibration specimen enable the present invention to assemble a calibrated length scale which may be used to correct individual feature positions in a full two-dimensional scan, each scan line in a two-dimensional image, or an average cross-section of the two-dimensional scan.</description><edition>6</edition><language>eng</language><subject>APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] ; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC ; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS ; GENERATION ; MEASURING ; MEASURING ANGLES ; MEASURING AREAS ; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ; PHYSICS ; SCANNING-PROBE TECHNIQUES OR APPARATUS ; TECHNICAL SUBJECTS COVERED BY FORMER USPC ; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS ; TESTING</subject><creationdate>1997</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19970701&DB=EPODOC&CC=US&NR=5644512A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19970701&DB=EPODOC&CC=US&NR=5644512A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LOHR; JASON D</creatorcontrib><creatorcontrib>CHERNOFF; DONALD A</creatorcontrib><title>High precision calibration and feature measurement system for a scanning probe microscope</title><description>The present invention allows for calibration of a scanning probe microscope under computer control. 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Comparison of the measured scan feature positions with the known topography of the scanned calibration specimen enable the present invention to assemble a calibrated length scale which may be used to correct individual feature positions in a full two-dimensional scan, each scan line in a two-dimensional image, or an average cross-section of the two-dimensional scan.</description><subject>APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]</subject><subject>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</subject><subject>ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC</subject><subject>GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS</subject><subject>GENERATION</subject><subject>MEASURING</subject><subject>MEASURING ANGLES</subject><subject>MEASURING AREAS</subject><subject>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</subject><subject>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</subject><subject>PHYSICS</subject><subject>SCANNING-PROBE TECHNIQUES OR APPARATUS</subject><subject>TECHNICAL SUBJECTS COVERED BY FORMER USPC</subject><subject>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS</subject><subject>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1997</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqFjDEOwjAMALswIOAN-AMMQMuOEKg7MDBVrnFaS40TxWHg9wSJneluON28erQyjBATk5gEBcJJ-oT566hPcIz5lRg8oxV61gz2tsweXEiAYISqokN5hL50QikYhcjLauZwMl79uKjWl_Pt1G44ho4tIrFy7u7X5lDXzXZ33P8vPjuzOoM</recordid><startdate>19970701</startdate><enddate>19970701</enddate><creator>LOHR; JASON D</creator><creator>CHERNOFF; DONALD A</creator><scope>EVB</scope></search><sort><creationdate>19970701</creationdate><title>High precision calibration and feature measurement system for a scanning probe microscope</title><author>LOHR; JASON D ; CHERNOFF; DONALD A</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US5644512A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1997</creationdate><topic>APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]</topic><topic>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</topic><topic>ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC</topic><topic>GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS</topic><topic>GENERATION</topic><topic>MEASURING</topic><topic>MEASURING ANGLES</topic><topic>MEASURING AREAS</topic><topic>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</topic><topic>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</topic><topic>PHYSICS</topic><topic>SCANNING-PROBE TECHNIQUES OR APPARATUS</topic><topic>TECHNICAL SUBJECTS COVERED BY FORMER USPC</topic><topic>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS</topic><topic>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>LOHR; JASON D</creatorcontrib><creatorcontrib>CHERNOFF; DONALD A</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LOHR; JASON D</au><au>CHERNOFF; DONALD A</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>High precision calibration and feature measurement system for a scanning probe microscope</title><date>1997-07-01</date><risdate>1997</risdate><abstract>The present invention allows for calibration of a scanning probe microscope under computer control. The present invention comprehends either the removal of nonlinear artifacts in the microscope output data after measurement has been taken (a off-line process), or the correction of nonlinear movements in the microscope scanner such that the scanner moves in a linear fashion during measurement (a realtime process). The realtime process may be operated in both an open-loop and a closed-loop process. The processes of the present invention uses an average cross-section of the scan in order to simplify the calculation and to improve the signal-to-noise ratio. Interpolation methods and centroid calculations are used to locate features on the scanned sample to subpixel precision. Comparison of the measured scan feature positions with the known topography of the scanned calibration specimen enable the present invention to assemble a calibrated length scale which may be used to correct individual feature positions in a full two-dimensional scan, each scan line in a two-dimensional image, or an average cross-section of the two-dimensional scan.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERATION MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TESTING |
| title | High precision calibration and feature measurement system for a scanning probe microscope |
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