Computer-controlled chemical dispensing with alternative operating modes

Liquid chemical supply ampules, commonly called "bubblers", which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals fr...

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Bibliographische Detailangaben
Hauptverfasser: BOEGLIN, HERMAN J, GOOSSENS, DIRK
Format: Patent
Sprache:eng
Schlagworte:
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