Computer-controlled chemical dispensing with alternative operating modes
Liquid chemical supply ampules, commonly called "bubblers", which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals fr...
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| creator | BOEGLIN HERMAN J GOOSSENS DIRK |
| description | Liquid chemical supply ampules, commonly called "bubblers", which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals from which the ampules produce a gas stream which is saturated with the chemicals. An individual ampule will be connected by means of a selectively operable series of transfer valves to two separate chemical bulk supply tanks. The bulk supply tanks can include one fixed and one replaceable tank; or two replaceable tanks. A chemical supply system is operated by a microprocessor controller which is programmed to be able to selectively manipulate the transfer valves so as to supply the bubbler ampule with chemicals from the fixed bulk tank, and to refill the fixed tank with chemicals from the replaceable tank; or alternatively, the controller can manipulate the transfer valves so as to supply chemicals to the bubbler ampule, first from one replaceable tank, and then from the other replaceable tank. The system is thus able to operate production lines which use either one fixed bulk chemical supply tank and one replaceable bulk chemical supply tank; or two replaceable bulk chemical supply tanks. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US5551309A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US5551309A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US5551309A3</originalsourceid><addsrcrecordid>eNqFijEKAjEUBdNYiHoGc4EFZUlhKcvK9mq9fJKnG0jyQ37U65vC3moGZtZqGjjmV0XpLKdaOAQ4bRdEbylo5yUjiU9P_fF10RTamaj6NzRnlGYtRXaQrVo9KAh2P27U_jLehqlD5hmSySKhzverMebYH07n_v_xBVlbNKk</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Computer-controlled chemical dispensing with alternative operating modes</title><source>esp@cenet</source><creator>BOEGLIN; HERMAN J ; GOOSSENS; DIRK</creator><creatorcontrib>BOEGLIN; HERMAN J ; GOOSSENS; DIRK</creatorcontrib><description>Liquid chemical supply ampules, commonly called "bubblers", which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals from which the ampules produce a gas stream which is saturated with the chemicals. An individual ampule will be connected by means of a selectively operable series of transfer valves to two separate chemical bulk supply tanks. The bulk supply tanks can include one fixed and one replaceable tank; or two replaceable tanks. A chemical supply system is operated by a microprocessor controller which is programmed to be able to selectively manipulate the transfer valves so as to supply the bubbler ampule with chemicals from the fixed bulk tank, and to refill the fixed tank with chemicals from the replaceable tank; or alternatively, the controller can manipulate the transfer valves so as to supply chemicals to the bubbler ampule, first from one replaceable tank, and then from the other replaceable tank. The system is thus able to operate production lines which use either one fixed bulk chemical supply tank and one replaceable bulk chemical supply tank; or two replaceable bulk chemical supply tanks.</description><edition>6</edition><language>eng</language><subject>BOTTLES, JARS OR SIMILAR CONTAINERS ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; CONTROLLING ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISEPROVIDED FOR ; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC ; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; LIQUID HANDLING ; METALLURGY ; OPENING, CLOSING ; PERFORMING OPERATIONS ; PHYSICS ; REGULATING ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES ; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ; TECHNICAL SUBJECTS COVERED BY FORMER USPC ; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ; TRANSPORTING</subject><creationdate>1996</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19960903&DB=EPODOC&CC=US&NR=5551309A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19960903&DB=EPODOC&CC=US&NR=5551309A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BOEGLIN; HERMAN J</creatorcontrib><creatorcontrib>GOOSSENS; DIRK</creatorcontrib><title>Computer-controlled chemical dispensing with alternative operating modes</title><description>Liquid chemical supply ampules, commonly called "bubblers", which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals from which the ampules produce a gas stream which is saturated with the chemicals. An individual ampule will be connected by means of a selectively operable series of transfer valves to two separate chemical bulk supply tanks. The bulk supply tanks can include one fixed and one replaceable tank; or two replaceable tanks. A chemical supply system is operated by a microprocessor controller which is programmed to be able to selectively manipulate the transfer valves so as to supply the bubbler ampule with chemicals from the fixed bulk tank, and to refill the fixed tank with chemicals from the replaceable tank; or alternatively, the controller can manipulate the transfer valves so as to supply chemicals to the bubbler ampule, first from one replaceable tank, and then from the other replaceable tank. The system is thus able to operate production lines which use either one fixed bulk chemical supply tank and one replaceable bulk chemical supply tank; or two replaceable bulk chemical supply tanks.</description><subject>BOTTLES, JARS OR SIMILAR CONTAINERS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>CONTROLLING</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISEPROVIDED FOR</subject><subject>GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC</subject><subject>GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>LIQUID HANDLING</subject><subject>METALLURGY</subject><subject>OPENING, CLOSING</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>REGULATING</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES</subject><subject>TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION</subject><subject>TECHNICAL SUBJECTS COVERED BY FORMER USPC</subject><subject>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1996</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqFijEKAjEUBdNYiHoGc4EFZUlhKcvK9mq9fJKnG0jyQ37U65vC3moGZtZqGjjmV0XpLKdaOAQ4bRdEbylo5yUjiU9P_fF10RTamaj6NzRnlGYtRXaQrVo9KAh2P27U_jLehqlD5hmSySKhzverMebYH07n_v_xBVlbNKk</recordid><startdate>19960903</startdate><enddate>19960903</enddate><creator>BOEGLIN; HERMAN J</creator><creator>GOOSSENS; DIRK</creator><scope>EVB</scope></search><sort><creationdate>19960903</creationdate><title>Computer-controlled chemical dispensing with alternative operating modes</title><author>BOEGLIN; HERMAN J ; GOOSSENS; DIRK</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US5551309A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1996</creationdate><topic>BOTTLES, JARS OR SIMILAR CONTAINERS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>CONTROLLING</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISEPROVIDED FOR</topic><topic>GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC</topic><topic>GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>LIQUID HANDLING</topic><topic>METALLURGY</topic><topic>OPENING, CLOSING</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>REGULATING</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES</topic><topic>TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION</topic><topic>TECHNICAL SUBJECTS COVERED BY FORMER USPC</topic><topic>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>BOEGLIN; HERMAN J</creatorcontrib><creatorcontrib>GOOSSENS; DIRK</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BOEGLIN; HERMAN J</au><au>GOOSSENS; DIRK</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Computer-controlled chemical dispensing with alternative operating modes</title><date>1996-09-03</date><risdate>1996</risdate><abstract>Liquid chemical supply ampules, commonly called "bubblers", which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals from which the ampules produce a gas stream which is saturated with the chemicals. An individual ampule will be connected by means of a selectively operable series of transfer valves to two separate chemical bulk supply tanks. The bulk supply tanks can include one fixed and one replaceable tank; or two replaceable tanks. A chemical supply system is operated by a microprocessor controller which is programmed to be able to selectively manipulate the transfer valves so as to supply the bubbler ampule with chemicals from the fixed bulk tank, and to refill the fixed tank with chemicals from the replaceable tank; or alternatively, the controller can manipulate the transfer valves so as to supply chemicals to the bubbler ampule, first from one replaceable tank, and then from the other replaceable tank. The system is thus able to operate production lines which use either one fixed bulk chemical supply tank and one replaceable bulk chemical supply tank; or two replaceable bulk chemical supply tanks.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BOTTLES, JARS OR SIMILAR CONTAINERS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTROLLING DIFFUSION TREATMENT OF METALLIC MATERIAL DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISEPROVIDED FOR GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIQUID HANDLING METALLURGY OPENING, CLOSING PERFORMING OPERATIONS PHYSICS REGULATING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING |
| title | Computer-controlled chemical dispensing with alternative operating modes |
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