Method of making integrated circuit waveguide

Manufacturing techniques for forming waveguide channels and devices. A trench is formed in a cladding layer through an opening in a conductive layer. The trench is then filled with an active waveguide polymer and the conductive layer is patterned such that the active waveguide polymer may be poled....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DAS, SIDDHARTHA, FUJIMOTO, HARRY H
Format: Patent
Sprache:eng
Schlagworte:
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