Method of ultra high sensitivity hydrogen detection with slow multiply-charged ions

The present invention is to provide a method for detecting hydrogen with ultra high sensitivity based on slow multiply-charged ion wherein damages of a target surface can be remarkably reduced and a quantitative analysis of hydrogen atoms on a solid surface can be compactly realized with extremely h...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMAZAKI, YASUNORI, KUROKI, KENRO, KOMAKI, KENICHIRO, KAKUTANI, NOBUKAZU, AZUMA, TOSHIYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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