Pressure transducer apparatus having a rigid member extending between diaphragms

A monolithic capacitive differential pressure transducer (68, 156, 170) is shown composed of ceramic material having first and second cavities formed adjacent to opposed face surfaces to form first and second flexible diaphragms (70, 72; 110, 140; 172, 174) and a motion transfer pin (74, 124/130, 20...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MAHER, THOMAS R, SOGGE, DALE R, CHARBONEAU, THOMAS J, STROTT, DOUGLAS B
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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